Products & Solutions

IN-SITU WAFER TEMPERATURE WAFER

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Technical Data
Wafer Sensor Type Items Value
TC wafer 9105 Temperature range: 00°C to 1100 °C (K type)
0°C to 1800 °C (C or D type)
Measurement accuracy: ±1.1°C or ±0.4% (K type)
±4.0°C or ±0.5% (C or D type)
Wafer size: 2”, 4”, 6”, 8”, 12”
No. of measurement points: 1 – 34 (standard or customized)
RTD Wafer 9107 Temperature range: -40°C to 250 °C
Measurement accuracy: ±0.1℃ @ 0℃
Wafer size: 2”, 4”, 6”, 8”, 12”
No. of measurement points: 1 – 65 (standard or customized)
Fiber Wafer 9109 Temperature range: -40°C to 420 °C
Measurement accuracy: ±0.5℃, @ -40~250℃
±1.5℃, @ 250~420℃
Wafer size: 4”, 6”, 8”, 12”
No. of Measurement points: Standard 1-4; or Customized
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